4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Toru Takahama

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Semiconductor producing apparatus comprising wafer vacuum chucki

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Semiconductor producing apparatus, and wafer vacuum chucking dev

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Thin film forming apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Working system for circuit boards

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1533956

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