4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Torrex Equipment Corp.

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Apparatus and method for plasma enhanced chemical vapor...

Coating apparatus – Gas or vapor deposition – With treating means
Utility Patent

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High rate silicon deposition method at low pressures

Coating processes – Coating by vapor – gas – or smoke – Base includes an inorganic compound containing silicon or...
Reexamination Certificate

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Mini-batch process chamber

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2016145

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