4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Tomoyuki Horiuchi

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Pattern writing apparatus using charged particle beam, and...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Writing data processing control apparatus, writing method,...

Error detection/correction and fault detection/recovery – Data processing system error or fault handling – Reliability and availability
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Profile ID: LFUS-PAI-P-3198558

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