4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Tomomi Kondo

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Magnetron plasma processing apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Plasma process device

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Process device

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-787219

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