4. Etching a substrate: processes
  5. Masking of a substrate using material resistant to an etchant

Tomohiko Sogo

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Device, manufacturing method thereof, and electronic...

Liquid crystal cells – elements and systems – Particular structure – Having significant detail of cell structure only
Reexamination Certificate

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Manufacturing method of fine structure, optical element,...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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