4. Data processing: measuring, calibrating, or testing
  5. Measurement system
  6. Orientation or position

Tomohiko Hirano

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Exposure apparatus, exposure method, and device...

Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate

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Position detecting system for projection exposure apparatus

Data processing: measuring – calibrating – or testing – Measurement system – Orientation or position
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2602859

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