4. Material or article handling
  5. Horizontally swinging load support
  6. Swinging about pivot

Tokunobu Akao

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Substrate carrying apparatus

Material or article handling – Horizontally swinging load support – Swinging about pivot
Patent

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Substrate heating equipment for use in a semiconductor fabricati

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Patent

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Substrate processing device, substrate conveying device, and...

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-915160

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