4. Etching a substrate: processes
  5. Etching of semiconductor material to produce an article...

Toi Yue Becky Leung

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Dry etch release of MEMS structures

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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Gate electrode dopant activation method for semiconductor...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
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Gate electrode dopant activation method for semiconductor...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Integrated method for release and passivation of MEMS...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Integrated method for release and passivation of MEMS...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2667492

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