4. Abrading
  5. Abrading process
  6. With tool treating or forming

Timothy Scott Bullard

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In-situ pad conditioning process for CMP

Abrading – Abrading process – With tool treating or forming
Patent

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Post CMP clean brush with torque monitor

Brushing – scrubbing – and general cleaning – Machines – Brushing
Reexamination Certificate

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Post CMP cleaning method using a brush cleaner with torque...

Cleaning and liquid contact with solids – Processes – Using solid work treating agents
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1609654

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