4. Etching a substrate: processes
  5. Etching of semiconductor material to produce an article...

Timothy S. Norris

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Method of manufacturing a motion sensor

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Patent

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Scale factor compensation for piezo-electric rate sensors

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent

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Single axis attitude sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent

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Vibrating planar gyro

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
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Profile ID: LFUS-PAI-P-699336

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