4. Etching a substrate: processes
  5. Masking of a substrate using material resistant to an etchant

Thomas Thurn-Albrecht

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Methods and apparatus for forming submicron patterns on films

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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Methods and apparatus for forming submicron patterns on films

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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Nanocylinder arrays

Semiconductor device manufacturing: process – Having organic semiconductive component
Reexamination Certificate

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Nanocylinder arrays

Active solid-state devices (e.g. – transistors – solid-state diode – Physical configuration of semiconductor
Reexamination Certificate

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