4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Thomas M. Pratt

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Dual seal deposition process chamber and process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Isolation of incompatible processes in a multi-station processin

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Isolation of incompatible processes in a multi-station...

Coating processes – Coating by vapor – gas – or smoke – Metal coating
Reexamination Certificate

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Magnetically coupled linear servo-drive mechanism

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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