4. Coherent light generators
  5. Particular active media
  6. Gas

Thomas A. Yager

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DUV light source optical element improvements

Coherent light generators – Particular resonant cavity – Mirror support or alignment structure
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High power deep ultraviolet laser with long life optics

Coherent light generators – Particular active media – Gas
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Relax gas discharge laser lithography light source

Coherent light generators – Particular active media – Gas
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Profile ID: LFUS-PAI-P-2868496

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