4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Terukazu Aitani

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Method and apparatus for cleaning a chamber

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Method and apparatus for cleaning a chamber

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Profile ID: LFUS-PAI-P-429978

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