4. Etching a substrate: processes
  5. Etching to produce porous or perforated article

Terrence M. Mackey

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Method of forming a nano-supported sponge catalyst on a...

Etching a substrate: processes – Etching to produce porous or perforated article
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Methods for fabricating a semiconductor chip having CMOS...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Plasma etch method for forming uniform linewidth residue...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Thermal isolation using vertical structures

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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