4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Teiichi Kimura

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Dry etching method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method for driving plasma display panel

Computer graphics processing and selective visual display system – Plural physical display element control system – Display elements arranged in matrix
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Particle-dispersed complex and solid electrolytic sensor...

Chemistry: electrical and wave energy – Apparatus – Electrolytic
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Sputtering apparatus

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Sputtering method and apparatus

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Profile ID: LFUS-PAI-P-2022689

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