4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Teh-Tien Su

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Plasma dielectric etch process including ex-situ backside...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Removal of process residues on the backside of a substrate

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3107014

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