Semiconductor device manufacturing: process
Coating of substrate containing semiconductor region or of...
Insulative material deposited upon semiconductive substrate
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Defect-free dielectric coatings and preparation thereof...
Defect-free dielectric coatings and preparation thereof...
Nitrogen-containing polymers as porogens in the preparation...
Nitrogen-containing polymers as porogens in the preparation...
Porous organosilicates with improved mechanical properties
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