4. Optical waveguides
  5. Integrated optical circuit

Takemi Kawazoe

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Method for manufacturing semiconductor module

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Including integrally formed optical element
Reexamination Certificate

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Optical waveguide device and method of making the same

Optical waveguides – Integrated optical circuit
Patent

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Profile ID: LFUS-PAI-P-2002170

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