4. Coating processes
  5. Direct application of electrical, magnetic, wave, or...
  6. Plasma

Taiwan Semiconductor Maufacturing Company

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Integrated high density plasma chemical vapor deposition...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Method of low-K/copper dual damascene

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Shallow trench isolation filled by high density plasma chemical

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Patent

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