4. Electric heating
  5. Metal heating
  6. By arc

Tadayoshi Okuya

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Discharge tube for a local etching apparatus and a local...

Electric heating – Metal heating – By arc
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Local dry etching method

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Local dry etching method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Nanotopography removing method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Profile ID: LFUS-PAI-P-2507807

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