4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Tadashi Inokuchi

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Electrostatic chucking stage and substrate processing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reissue Patent

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Electrostatic chucking stage and substrate processing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Layered ceramic/metallic assembly, and an electrostatic...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2365554

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