4. Electricity: electrical systems and devices
  5. Electric charge generating or conducting means
  6. Use of forces of electric charge or field

Surface Technology Systems PLC

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Gas delivery system

Etching a substrate: processes – Etching and coating occur in the same processing chamber
Reexamination Certificate

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Method and apparatus for anisotropic etching

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Method and apparatus for dechucking a substrate from an...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method and apparatus for stabilizing a plasma

Etching a substrate: processes – Etching and coating occur in the same processing chamber
Reexamination Certificate

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Plasma etching

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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