Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
Corporate Assignee
active
No affiliations
Adjustable shadow mask for improving uniformity of film...
All optical logic using cross-phase modulation amplifiers...
All-optical logic with wired-OR multi-mode-interference...
Integrated 3-dimensional multi-layer thin-film optical...
Sputtering chamber with moving table producing orbital...
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