4. Computer-aided design and analysis of circuits and semiconductor
  5. Design of semiconductor mask or reticle

Sun-Young Choi

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Method of inspecting mask using aerial image inspection...

Computer-aided design and analysis of circuits and semiconductor – Design of semiconductor mask or reticle
Reexamination Certificate

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Phase-shift mask and method of forming the same

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2201800

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