4. Radiant energy
  5. Inspection of solids or liquids by charged particles

Sughrue, Mion, Zinn, MacPeak & Seas

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AFM-based lithography metrology tool

Radiant energy – Inspection of solids or liquids by charged particles
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Compact independent pressure control and vacuum isolation...

Fluid handling – Processes – Involving pressure control
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Optical inspection method and apparatus utilizing a variable...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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System and method for automatic analysis of defect material...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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