4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Su-Chen Fan

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Pre-treatment for salicide process

Coating processes – Direct application of electrical – magnetic – wave – or... – Chemical vapor deposition
Reexamination Certificate

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Pre-treatment for salicide process

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Three dimensional IC device and alignment methods of IC...

Semiconductor device manufacturing: process – Semiconductor substrate dicing
Reexamination Certificate

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Three dimensional IC device and alignment methods of IC...

Semiconductor device manufacturing: process – Semiconductor substrate dicing
Reexamination Certificate

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Wiring structure to minimize stress induced void formation

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2059400

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