Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
Examiner
active
No affiliations
Acoustic streaming of condensate during sputtered metal...
Apparatus and method for self-centering a wafer in a sputter...
Apparatus for and method of forming electrode for lithium...
Application of multi-layer antistatic/antireflective coating...
Arrangement for orienting the magnetization direction of...
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