4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Steven N. Towle

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Dual damascene process using a low k interlayer for forming...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Healing of micro-cracks in an on-chip dielectric

Active solid-state devices (e.g. – transistors – solid-state diode – Physical configuration of semiconductor – With peripheral feature due to separation of smaller...
Reexamination Certificate

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Healing of micro-cracks in an on-chip dielectric

Semiconductor device manufacturing: process – Semiconductor substrate dicing
Reexamination Certificate

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Method for improving thermal stability of fluorinated...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Method for making a carbon doped oxide dielectric material

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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