4. Coating apparatus
  5. Gas or vapor deposition

Steven Gianoulakis

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Gas distribution showerhead

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Gas distribution showerhead featuring exhaust apertures

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Particle removal apparatus

Drying and gas or vapor contact with solids – Apparatus – Houses – kilns – and containers
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Profile ID: LFUS-PAI-P-2687387

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