4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Steven C. Selbrede

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Differential pressure CVD chuck

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Differential pressure CVD chuck

Coating processes – Coating by vapor – gas – or smoke
Patent

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Inductive plasma reactor

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
Reexamination Certificate

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Inductive plasma reactor

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Purge gas in wafer coating area selection

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Profile ID: LFUS-PAI-P-698994

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