4. Optical: systems and elements
  5. Optical modulator
  6. Light wave temporal modulation

Steve Zee

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Silicon-rich silicon nitrides as etch stops in MEMS manufacture

Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate

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Silicon-rich silicon nitrides as etch stops in MEMS manufacture

Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2424494

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