4. Printing
  5. Layout or registration

Sterling G. Watson

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Apparatus and methods for providing selective defect...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Apparatus and methods for providing selective defect...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Method for determining and correcting reticle variations

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Method for monitoring a reticle

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
Reexamination Certificate

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System and method for determining reticle defect printability

Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1704447

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