4. Semiconductor device manufacturing: process
  5. Making field effect device having pair of active regions...
  6. Having insulated gate

Stephen B. Akerman

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Etch stop layer used for the fabrication of an overlying crown s

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Pre deposition stabilization method for forming a void free isot

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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