4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Steag C.V.D. Systems Ltd.

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Method and apparatus for removing native oxide layers from...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Wafer heating apparatus and method with radiation absorptive per

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Patent

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