4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Stallman and Pollock

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Integrated self aligned contact etch

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method of reducing stop layer loss in a photoresist...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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