4. Cleaning and liquid contact with solids
  5. Processes
  6. Including application of electrical radiant or wave energy...

Srinivas Nemani

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Dielectric gap fill with oxide selectively deposited over...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

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Dual frequency plasma enhanced chemical vapor deposition of...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Dual frequency plasma enhanced chemical vapor deposition of...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Formation of a liquid-like silica layer by reaction of an...

Coating processes – Coating by vapor – gas – or smoke – Carbon or carbide coating
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Method and apparatus for gettering fluorine from chamber materia

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Profile ID: LFUS-PAI-P-1247539

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