4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. With microwave gas energizing means

SpeedFam-IPEC Co., Ltd.

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Local etching apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Wafer etching method

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Wafer flattening process

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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