Semiconductor device manufacturing: process
Chemical etching
Vapor phase etching
Inventor
active
Method for enhancing etching of TiSix
Method of etching polycide structures
Method of operating a dual chamber reactor with neutral...
Methodologies to reduce process sensitivity to the chamber...
Methodology for in-situ and real-time chamber condition...
No associations
LandOfFree
Songlin Xu does not yet have a rating. At this time, there are no reviews or comments for this inventor.
If you have personal experience with Songlin Xu, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Songlin Xu will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-P-1984304