Semiconductor device manufacturing: process
Formation of electrically isolated lateral semiconductive...
Grooved and refilled with deposited dielectric material
Inventor
active
Biased H 2 etch process in deposition-etch-deposition gap fill
Method for controlling etch process repeatability
No associations
LandOfFree
Siswanto Sutanto does not yet have a rating. At this time, there are no reviews or comments for this inventor.
If you have personal experience with Siswanto Sutanto, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Siswanto Sutanto will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-P-2901526