4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Shouli Hsia

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Combined dry and wet etch for improved silicide formation

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Patent

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Local interconnection process for preventing dopant cross diffus

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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Local interconnection process for preventing dopant cross...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-583945

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