4. Cleaning and liquid contact with solids
  5. Processes
  6. With work or work parts movable during treatment

Shiu-Ko JangJian

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Methods of spin-on wafer cleaning

Cleaning and liquid contact with solids – Processes – With work or work parts movable during treatment
Reexamination Certificate

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Oxygen-rich layers underlying BPSG

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Profile ID: LFUS-PAI-P-3189440

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