4. Coating processes
  5. Direct application of electrical, magnetic, wave, or...
  6. Plasma

Shing-Li Sung

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Process for synthesizing one-dimensional nanosubstances by...

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate

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Process to open carbon based hardmask

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2531940

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