4. Semiconductor device manufacturing: process
  5. Making passive device
  6. Trench capacitor

Shih-Chi Shu

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Dual damascene process using a single photo mask

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate

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Method of forming a bottom electrode of a capacitor in a...

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2730909

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