4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Vacuum arc discharge coating

Shi Xu

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Plasma processing apparatus with real-time particle filter

Chemistry: electrical and wave energy – Apparatus – Vacuum arc discharge coating
Reexamination Certificate

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Plasma processing apparatus with real-time particle filter

Chemistry: electrical and wave energy – Apparatus – Vacuum arc discharge coating
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2661273

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