4. Electric heating
  5. Metal heating
  6. By arc

Sheng Sun

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Annealing an amorphous film using microwave energy

Electric heating – Metal heating – By arc
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Chamber cleaning via rapid thermal process during a cleaning...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Hybrid PVD-CVD system

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Method and apparatus for enhanced chamber cleaning

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Method and apparatus for enhancing chamber cleaning

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
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Profile ID: LFUS-PAI-P-2099803

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