4. Coating processes
  5. Direct application of electrical, magnetic, wave, or...
  6. Plasma

Sheng-Hsiung Chen

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Epitaxial plasma enhanced chemical vapor deposition (PECVD)...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – On insulating substrate or layer
Reexamination Certificate

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Fabrication process for metal-insulator-metal capacitor with...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Fabrication process for metal-insulator-metal capacitor with...

Semiconductor device manufacturing: process – Making passive device – Stacked capacitor
Reexamination Certificate

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Integration process for Al pad

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Having substrate registration feature
Reexamination Certificate

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Method for fabricating metal gates in deep sub-micron devices

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Profile ID: LFUS-PAI-P-612569

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