4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Sheldon M. Kugelmass

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Lithographic electron-beam exposure apparatus and methods

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Multiple fluid sample processor and system

Chemical apparatus and process disinfecting – deodorizing – preser – Control element responsive to a sensed operating condition
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1220893

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