4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Mixture of vapors or gases utilized

Shankar Vankataranan

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Method and apparatus for elimination of TEOS/ozone silicon...

Coating apparatus – Program – cyclic – or time control – Having prerecorded program medium
Reexamination Certificate

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Method for elimination of TEOS/ozone silicon oxide surface sensi

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Patent

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Profile ID: LFUS-PAI-P-1345699

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