4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Liquid phase etching

SEZ Semiconductor-Equipment Zubehor fur die Halbleiterfertigung

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Apparatus for preventing dripping from conduit openings

Fluid sprinkling – spraying – and diffusing – With cleaning means – drip collecting – waste disposal or soil... – Nozzle cleaner – flusher or drainer
Patent

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Arrangement for treatment of wafer-shaped articles, particularly

Cleaning and liquid contact with solids – Apparatus – With means to movably mount or movably support the work or...
Patent

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Gripper for disk-shaped articles

Handling: hand and hoist-line implements – Grapple – Slideable jaws
Patent

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Process and device for one-sided treatment of disk-shaped object

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Process for treating semiconductor substrates

Semiconductor device manufacturing: process – Chemical etching
Reexamination Certificate

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